Manufacturer/company:
Deutschordenstrasse 38
Westhausen
Germany
| Name of test piece/s | Autowafer SAM 302 SAM0100970 mod1 |
|---|---|
| Project number | PV 2603-1739 |
| Created on | 05/26/2026 |
| Valid until | 04/30/2031 |
| Test type | Digital Testing |
| Classfication | Mittleres Risiko , Sehr hohes Risiko |
|
Digital Testing |
||
| Summary assessment results | ||
|
Airflow |
whirl zones
|
medium risk |
| direct flow around the wafer paths |
medium risk |
|
| backflow |
medium risk |
|
| Airflow velocity (along the wafers path) |
very high risk | |
|
Pressure distribution
|
medium risk |
|
